Chin. J. Semicond. > 1990, Volume 11 > Issue 11 > 859-865
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Co与Si和SiO_2在快速热退火中的反应

陈维德 , 崔玉德 , 许振嘉 and 陶江

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(11): 859-865
      陈维德, 崔玉德, 许振嘉, 陶江. Co与Si和SiO_2在快速热退火中的反应[J]. 半导体学报(英文版), 1990, 11(11): 859-865.
      Citation:
      陈维德, 崔玉德, 许振嘉, 陶江. Co与Si和SiO_2在快速热退火中的反应[J]. 半导体学报(英文版), 1990, 11(11): 859-865.
      shu

      • Received Date: 2015-08-19

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