Chin. J. Semicond. > 1995, Volume 16 > Issue 12 > 921-927
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硅微结构加速度传感器空气阻尼的研究

陈宏，鲍敏杭

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1995

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      Article Navigation >  Journal of Semiconductors  > 1995  >  16(12): 921-927
      陈宏，鲍敏杭. 硅微结构加速度传感器空气阻尼的研究[J]. 半导体学报(英文版), 1995, 16(12): 921-927.
      Citation:
      陈宏，鲍敏杭. 硅微结构加速度传感器空气阻尼的研究[J]. 半导体学报(英文版), 1995, 16(12): 921-927.
      shu

      • Received Date: 2015-08-19

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