Chin. J. Semicond. > 1989, Volume 10 > Issue 7 > 525-528
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一种制作亚微米间隔的方法

谢可勋 , 蒋建飞 and 谢缨

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(7): 525-528
      谢可勋, 蒋建飞, 谢缨. 一种制作亚微米间隔的方法[J]. 半导体学报(英文版), 1989, 10(7): 525-528.
      Citation:
      谢可勋, 蒋建飞, 谢缨. 一种制作亚微米间隔的方法[J]. 半导体学报(英文版), 1989, 10(7): 525-528.
      shu

      • Received Date: 2015-08-19

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