Chin. J. Semicond. > 2005, Volume 26 > Issue 5 > 952-957
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VHF-PECVD制备微晶硅材料及电池

张晓丹 , 赵颖 , 朱锋 , 魏长春 , 高艳涛 , 孙健 , 侯国付 , 薛俊明 , 耿新华 and 熊绍珍

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Key words: 甚高频等离子体增强化学气相沉积, 微晶硅薄膜, 微晶硅电池

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(5): 952-957
      张晓丹, 赵颖, 朱锋, 魏长春, 高艳涛, 孙健, 侯国付, 薛俊明, 耿新华, 熊绍珍. VHF-PECVD制备微晶硅材料及电池[J]. 半导体学报(英文版), 2005, 26(5): 952-957.
      Citation:
      张晓丹, 赵颖, 朱锋, 魏长春, 高艳涛, 孙健, 侯国付, 薛俊明, 耿新华, 熊绍珍. VHF-PECVD制备微晶硅材料及电池[J]. 半导体学报(英文版), 2005, 26(5): 952-957.
      shu

      • Received Date: 2015-08-19

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