Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 160-162
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Effects of Oxygen Content on the Crystal Quality of ZnO Films Grown on Si by RF-Magnetron Sputtering

Ma Xiaocui, Liu Wenjun, Zhu Deliang, Cao Peijiang, Jiang Zongzhang and Xiao Huojie

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Abstract: We report the effects of the growth ambient on the crystal quality of ZnO films grown on Si by RF-magnetron sputtering using ZnO target．These films are highly c-axis oriented．Upon increasing the O2／(Ar+O2)ratio in the growing ambient，the deposition rate is decreased for ZnO films．The crystallinity and alignment of ZnO films are strongly dependent on O2/(At+O2) ratio，and the crystal quality of the ZnO films at O2／(At十O2) ratio≈0.45 is better than others．

Key words: ZnO thin films, radio-frequency magnetron sputtering, O2/(At+O2) ratio

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Article Navigation >  Journal of Semiconductors  > 2007  >  28(S1): 160-162
      Ma Xiaocui, Liu Wenjun, Zhu Deliang, Cao Peijiang, Jiang Zongzhang, Xiao Huojie. Effects of Oxygen Content on the Crystal Quality of ZnO Films Grown on Si by RF-Magnetron Sputtering[J]. Journal of Semiconductors, 2007, 28(S1): 160-162. ****Ma X C, Liu W J, Zhu D L, Cao P J, Jiang Z Z, Xiao H J. Effects of Oxygen Content on the Crystal Quality of ZnO Films Grown on Si by RF-Magnetron Sputtering[J]. Chin. J. Semicond., 2007, 28(S1): 160.
      Citation:
      Ma Xiaocui, Liu Wenjun, Zhu Deliang, Cao Peijiang, Jiang Zongzhang, Xiao Huojie. Effects of Oxygen Content on the Crystal Quality of ZnO Films Grown on Si by RF-Magnetron Sputtering[J]. Journal of Semiconductors, 2007, 28(S1): 160-162. ****
      Ma X C, Liu W J, Zhu D L, Cao P J, Jiang Z Z, Xiao H J. Effects of Oxygen Content on the Crystal Quality of ZnO Films Grown on Si by RF-Magnetron Sputtering[J]. Chin. J. Semicond., 2007, 28(S1): 160.
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      Effects of Oxygen Content on the Crystal Quality of ZnO Films Grown on Si by RF-Magnetron Sputtering

      • School of Materials，Shenzhen University，Shenzhen 518060，China

      • Shenzhen Key Laboratory ofSpecial Functional Materials，Shenzhen 518060，China,School of Materials，Shenzhen University，Shenzhen 518060，China

      • Shenzhen Key Laboratory ofSpecial Functional Materials，Shenzhen 518060，China,School of Materials，Shenzhen University，Shenzhen 518060，China

      • Shenzhen Key Laboratory ofSpecial Functional Materials，Shenzhen 518060，China,School of Materials，Shenzhen University，Shenzhen 518060，China

      • Shenzhen Key Laboratory ofSpecial Functional Materials，Shenzhen 518060，China,Shenzhen Key Laboratory ofSpecial Functional Materials，Shenzhen 518060，China and Shenzhen Key Laboratory ofSpecial Functional Materials，Shenzhen 518060，China

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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