Chin. J. Semicond. > Volume 1 > Issue 1 > Article Number: 26

非均匀掺杂P-型GaAs红外等离子体反射光谱的计算

陈娓兮 , 李国华 , 钮金真 and 郭长志

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Abstract: 本文用电子计算机解光导纳微分方程组研究了P-型GaAs非均匀掺杂层中自由载流子的表面浓度、浓度分布、厚度和衬底浓度对红外等离子体反射光谱的影响,并讨论其应用方法和适用范围.

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 January 1980

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