Chin. J. Semicond. > Volume 12 > Issue 10 > Article Number: 633

YBa_2Cu_3O_(7-x)超导薄膜的离子束改性

李贻杰 , 任琮欣 , 陈国梁 , 陈建民 and 邹世昌

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Abstract: 本文主要研究了离子注入对YBa_7Cu_3O_(7-x)薄膜超导性质的影响.测量了Ar离子注入剂量与超导转变温度T_c之间的关系.实验结果表明,高质量的YBa_2Cu_3O_(7-x) 超导薄膜具有一定的抗辐照性.随着注入剂量的增加,临界电流密度I_c下降很快,但零电阻转变温度T_c却下降较慢.分析和讨论了离子注入对YBa_2Cu_3O_(7-x)中一维Cu-O链和二维Cu-O面的影响,探讨了离子束改性手段在YBa_2Cu_3O_(7-x)超导薄膜图形加工中应用的可能性.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 October 1991

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