Chin. J. Semicond. > Volume 12 > Issue 10 > Article Number: 625

量热式集成传感器的热电模拟及实验研究

黄金彪 and 童勤义

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Abstract: 本文把最热式传感器中的热传输看成行波,利用热电模拟及传输线分析方法,计算了热传输函数并得到了实验的验证,在此基础上进一步计算了传感器的增益稳定裕度、相对不平衡度和闭环增益等性能,为传感器的设计提供了重要的依据.该方法具有准确、直观、求解方便等优点.最后本文给出了上述理论计算为基础设计的集成温度传感器的实验结果.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 October 1991

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