Chin. J. Semicond. > Volume 10 > Issue 12 > Article Number: 945

高纯气体中痕量金属杂质的测定

崔仙航 , 徐学敏 , 严性天 and 郎文卉

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Abstract: 本工作深入研究了高纯氮、氢、氯化氢、氨、硼烷、硅烷、砷烷及磷烷中钼、钙、铬、铜、铁、钾、锰、钠、铅和锌十种常见金属杂质的测定方法,解决了易燃、易爆及剧毒气体的取样,溶液的吸收条件及基体分离等问题.建立了无火焰原子吸收光谱法测定ng·g~(-1)量级的杂质,方法灵敏,简便,对生产及研制工艺将起积极的指导作用.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 December 1989

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