Chin. J. Semicond. > Volume 15 > Issue 5 > Article Number: 317

低温分子束外延GaAs薄膜的研究

邓航军,范缇文,王占国,梁基本,朱战萍,李瑞钢

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Abstract: 我们利用分子束外延方法生长了低温GaAs薄膜,并应用X射线双晶衍射、TEM等手段对其进行了初步研究.发现原生样品和树底之间存在晶格失配.随着退火温度的上升,晶格失配逐渐消失.TEM观察到600,700,850℃退火后的样品中存在大量的砷沉淀物.沉淀物大致呈球形.砷沉淀物的直径随着退火温度的上升而线性地增大,而密度却随退火温度的上升指数地下降.

Key words: 低温 GaAs

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Guan Xuguang, Zhou Duan, Yang Yintang. Optimization design of a full asynchronous pipeline circuit based on null convention logic. J. Semicond., 2009, 30(7): 075010. doi: 10.1088/1674-4926/30/7/075010

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History

Manuscript received: 18 August 2015 Manuscript revised: Online: Published: 01 May 1994

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