Chin. J. Semicond. > Volume 17 > Issue 7 > Article Number: 545

GaAs(100)表面钝化和Mg/S/GaAs界面的SRPES研究

陆尔东,徐彭寿,徐世红,余小江,潘海斌,张新夷,赵天鹏,赵特秀

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Abstract: 应用同步辐射光电子谱(SRPES)表征了一种新的CH3CSNH2/NH4OH溶液体系处理的GaAs(100)表面的成键特性和电子态.结果表明,经过处理的GaAs(100)表面,S既与As成键也与Ga成键,形成了S与GaAs的新界面,这说明CH3CSNH2/NH4OH溶液处理的GaAs(100)表面具有明显的钝化作用.钝化表面退火处理后,发现AS的硫化物不稳定,分解或反应生成Ga-S成分和元素态As;室温下,Mg淀积硫钝化的GaAs表面的实验结果表明,Mg置换GaS的Ga成为金属Ga偏析到表面,而硫以MgS

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History

Manuscript received: 18 August 2015 Manuscript revised: Online: Published: 01 July 1996

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