Chin. J. Semicond. > Volume 3 > Issue 2 > Article Number: 147

微波无损伤法测半导体材料电阻率

王宗欣 , 赵惠芬 and 胡鸣华

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Abstract: <正> 1.计算方法 采用介质波导作为微波传输线测量样品的电阻率时,可将样品放在两根介质波导之间,如图1所示,可不必将样品切割成一定的形状,且由于介质波导的截面尺寸比样品小得多,因此可以较方便地确定同一块材料上不同部位电阻率的差异.

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 February 1982

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