Chin. J. Semicond. > Volume 12 > Issue 5 > Article Number: 273

电场调制效应对氧化层电流弛豫谱的影响

许铭真 , 谭长华 , 刘晓卫 and 王阳元

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Abstract: 本文用单陷阱电荷俘获模型研究了电场调制效应对氧化层电流弛豫谱(Oxide CurtentRelaxation Spectroscopy)——简称 OCRS的影响.给出了精确的 OCRS谱函数及其各级近似表述式;给出了确定陷阱参数(俘获截面,荷心及面密度)的精确公式及各类简化式;给出了各类近似成立的直观实验判据式.对实验结果进行了电场修正,得到了更为满意的结果.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 May 1991

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