Chin. J. Semicond. > 1991, Volume 12 > Issue 5 > 284-288
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硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应

陈维德 and H.Bender

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    Received: 19 August 2015 Revised: Online: Published: 01 May 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(5): 284-288
      陈维德, H.Bender. 硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应[J]. 半导体学报(英文版), 1991, 12(5): 284-288.
      Citation:
      陈维德, H.Bender. 硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应[J]. 半导体学报(英文版), 1991, 12(5): 284-288.
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      • Received Date: 2015-08-19

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