Chin. J. Semicond. > Volume 18 > Issue 9 > Article Number: 701

薄层电阻测试Mapping技术

孟庆浩 , 孙新宇 and 孙以材

+ Author Affiliations + Find other works by these authors

PDF

Abstract: 利用改进的范德堡法微区薄层电阻测试探针技术对n-Si片上的硼扩散图形进行薄层电阻的测量,并用发度表示其分布,可得到薄层电阻的不均匀度及平均值.这种所谓Mapping技术更有利于评价材料质量.

Search

Advanced Search >>

Article Metrics

Article views: 1692 Times PDF downloads: 1278 Times Cited by: 0 Times

History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 September 1997

Email This Article

User name:
Email:*请输入正确邮箱
Code:*验证码错误