Chin. J. Semicond. > Volume 2 > Issue 1 > Article Number: 74

四探针测圆形薄片电阻率的计算公式

陈学全 and 包德修

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Abstract: <正> 在一直线上等距离排列的四探针测薄圆片的电阻率ρ时,当圆片厚度W小于探针间距S的一半以上,且探针沿圆片径向方向排列,并以圆心为对称中心的情形,其计算公式已由F.M.Smits给出,

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 January 1981

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