Chin. J. Semicond. > Volume 18 > Issue 5 > Article Number: 380

GaAs薄膜电沉积机理的初探

韩爱珍 , 林逸青 , 赵永春 and 高元恺

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Abstract: 本文叙述了电沉积制备GaAs薄膜的原理.我们在不同的基片上均成功地得到了成分接近化学计量比的GaAs薄膜.初步探讨了GaAs薄膜的电沉积机理.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 May 1997

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