Chin. J. Semicond. > Volume 8 > Issue 1 > Article Number: 26

MCZ技术的研究

周士仁 , 纪彦蜀 , 孔庆茂 , 高元恺 , 王守雨 , 韩长林 and 傅择国

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Abstract: 本文在概述了 MCZ(Magnetic-field-applied CZ)技术的理论基础上,介绍了由作者们所研制的两种新型MCZ 硅单晶炉——“Y”形磁场和螺旋管全封闭式非线性磁场硅单晶炉,并在横向分量为1300G垂直分量为700G的“Y”形磁场中拉制出了MCZ 硅单晶.对氧含量和掺杂浓度的测量及对微观结构的初步观察表明,所设计的新型磁场单晶炉,可明显地提高硅单晶的掺杂均匀性和结构完整性.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 January 1987

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