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Chin. J. Semicond. > Volume 12 > Issue 2 > Article Number: 65

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Si(113)表面的原子结构

邢益荣 , 张敬平 , 吴汲安 , 刘赤子 and 王昌衡

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Abstract: 利用LEED研究了Si(113)表面的原子结构.清洁表面是采用离子轰击和退火方法制备的.实验发现:当温度高于600℃时表面为1×1结构,随着温度缓慢下降,表面原子结构发生1×1(?)3×1(?)3×2的可逆相变.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 February 1991

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