Chin. J. Semicond. > Volume 13 > Issue 11 > Article Number: 698

硅中的氮氧复合物和碳氧复合物

刘培东 , 余思明 , 李立本 , 张锦心 and 阙端麟

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Abstract: 前文[1]指出,硅中的氮氧复合物实质上是氮对-硅-氧复合体.本文运用这一结构模型预测了新的实验事实,并用实验进行了验证,同时分析了硅中的碳氧复合物,提出了硅中碳与氧,氮与氧相互作用的新见解.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 November 1992

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