Chin. J. Semicond. > 1989, Volume 10 > Issue 2 > 117-123
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VLSI中双层多晶硅结构的剖面研究

徐秋霞 , 冯淑敏 and 周锁京

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(2): 117-123
      徐秋霞, 冯淑敏, 周锁京. VLSI中双层多晶硅结构的剖面研究[J]. 半导体学报(英文版), 1989, 10(2): 117-123.
      Citation:
      徐秋霞, 冯淑敏, 周锁京. VLSI中双层多晶硅结构的剖面研究[J]. 半导体学报(英文版), 1989, 10(2): 117-123.
      shu

      • Received Date: 2015-08-19

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