Chin. J. Semicond. > Volume 12 > Issue 10 > Article Number: 596

用激光衍射计量技术对CdTe单晶生长的研究

杨柏梁 , 张传平 , 黄锡珉 and 于锡玲

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Abstract: 本文首次把激光衍射计量技术应用到晶体的高温气相生长动力学的研究工作中来.在闭管无籽晶升华法制备CdTe单晶的实验过程中,实时、连续、精确地测定了生长速率,并讨论了生长速率随过饱和度(△T)及生长时间的变化关系.实验测试精度达 10~(-6)m/s.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 October 1991

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