Chin. J. Semicond. > Volume 16 > Issue 8 > Article Number: 608

微氮硅中热施主和浅热施主的低温远红外研究

杨德仁,阙端麟

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Abstract: 利用低温(8K)远红外吸收技术,研究了硅单晶中氮杂质对热施主及浅热施主形成的影响,指出氮原子有抑制硅中热施主形成的能力,而微氮硅中的浅热施主和氧-氮复合体直接相关。

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 August 1995

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