Chin. J. Semicond. > Volume 18 > Issue 5 > Article Number: 325

硅基双色发光图形的研制

李宁生 , 鲍希茂 , 廖良生 and 王振飞

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Abstract: 本文提出一种制作硅基发光图形的方法,利用SiO2作掩膜,通过C+离子选区注入,退火处理及电化学腐蚀,使样品的单晶区形成多孔硅红-绿色发光区,注C+区域形成多孔SiC的蓝光发射区域,构成双色发光图形.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 May 1997

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