Chin. J. Semicond. > Volume 16 > Issue 6 > Article Number: 477

光致发光纳米晶粒硅薄膜的电子自旋共振研究

刘湘娜,王路春,佟嵩,鲍希茂,眭云霞,韩世莹,金通政

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Abstract: 用电子自旋共振(ESR)方法研究了含纳米晶粒:a-Si:H薄膜的缺陷态.这种薄膜是用等离子体增强CVD方法制备而成,未经任何后处理过程,在室温观察到可见光范围的光致发光.薄膜的ESR谱由三个部分组成:(1)一对轴向对称超精细谱线,其g∥=1.9967,g⊥=2.0016,其超精细常数为1.2×10-2T;(2)一条各向同性谱线,其g=2.0052.线宽△Hpp=1×10-3T;(3)一条轴向对称谱线,其g∥=2.0057,g⊥=2.0042.以上三部分分别来源于三个不同的顺磁中心本文分析了它们的产生,

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 June 1995

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