Chin. J. Semicond. > Volume 16 > Issue 6 > Article Number: 473

杂质锗对CZ-Si性能的影响

张维连,刘彩池,王志军,冀志江

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Abstract: 杂质锗对CZ-Si性能的影响张维连,刘彩池,王志军,冀志江(河北工学院材料研究中心天津300130)摘要CZ-Si中掺入等价元素Ge后能有效地抑制氧施主的形成速率和降低氧施主最大浓度,提高硅片的机械强度.对其机理进行了简要的探讨.PACC:8140,...

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 June 1995

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