J. Semicond. > 2025, Volume 46 > Issue 3 > 030402

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A flexible active-matrix X-ray detector based on two-dimensional material backplane

Haixing Meng, Ying Li and Guozhen Shen

+ Author Affiliations

 Corresponding author: Ying Li, liying0326@bit.edu.cn; Guozhen Shen, gzshen@bit.edu.cn

DOI: 10.1088/1674-4926/25020801CSTR: 32376.14.1674-4926.25020801

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[1]
Zhao J, Zhao L, Deng Y, et al. Perovskite-filled membranes for flexible and large-area direct-conversion X-ray detector arrays. Nat Photonics, 2020, 14, 612 doi: 10.1038/s41566-020-0678-x
[2]
He Y, Song J, Li M, et al. Perovskite computed tomography imager and three-dimensional reconstruction. Nat Photonics, 2024, 18, 1052 doi: 10.1038/s41566-024-01506-y
[3]
Wei H, Fang Y, Mulligan P, et al. Sensitive X-ray detectors made of methylammonium lead tribromide perovskite single crystals. Nat Photonics, 2016, 10, 333 doi: 10.1038/nphoton.2016.41
[4]
Kamiya T, Nomura K, Hosono H. Present status of amorphous In-Ga-Zn-O thin-film transistors. Sci Technol Adv Mater, 2010, 11, 044305 doi: 10.1088/1468-6996/11/4/044305
[5]
Li G, Wang Y, Huang L, et al. Research progress of high-sensitivity perovskite photodetectors: A review of photodetectors: noise, structure, and materials. ACS Appl Electron Mater, 2022, 4, 1485 doi: 10.1021/acsaelm.1c01349
[6]
Su Y, Ma W, Yang Y. Perovskite semiconductors for direct X-ray detection and imaging. J Semicond, 2020, 5, 051204 doi: 10.1088/1674-4926/41/5/051204
[7]
Yuan P, Zhang L, Zhu M, et al. Perovskite films for X-ray detection. J Semicond, 2022, 43, 070202. doi: 10.1088/1674-4926/43/7/070202
[8]
Li H, Song J, Pan W, et al. Sensitive and stable 2D perovskite single-crystal X-ray. Adv Mater, 2020, 32, 2003790 doi: 10.1002/adma.202003790
[9]
Kim Y, Kim K, Son D Y, et al. Printable organometallic perovskite enables large-area, low-dose X-ray imaging. Nature, 2017, 550, 87 doi: 10.1038/nature24032
[10]
Hwangbo S, Hu L, Hoang A T, et al. Wafer-scale monolithic integration of full-colour micro-LED display using MoS2 transistor. Nat Nanotechnol, 2022, 17, 500 doi: 10.1038/s41565-022-01102-7
[11]
Dodda A, Jayachandran D, Pannone A, et al. Active pixel sensor matrix based on monolayer MoS2 phototransistor array. Nat Mater, 2022, 21, 1379 doi: 10.1038/s41563-022-01398-9
[12]
Park Y J, Sharma B K, Shinde S M, et al. All MoS2-based large area, skin-attachable active-matrix tactile sensor. ACS Nano, 2019, 13, 3023 doi: 10.1021/acsnano.8b07995
[13]
Cui X, Lee G H, Kim Y, et al. Multi-terminal transport measurements of MoS2 using a van der Waals heterostructure device platform. Nat Nanotechnol, 2015, 10, 534 doi: 10.1038/nnano.2015.70
[14]
Choi C, Choi M K, Liu S, et al. Human eye-inspired soft optoelectronic device using high-density MoS2-graphene curved image sensor array. Nat Commun, 2017, 8, 1664 doi: 10.1038/s41467-017-01824-6
[15]
Kang J H, Shin H, Kim K S, et al. Monolithic 3D integration of 2D materials-based electronics towards ultimate edge computing solutions. Nat Mater, 2023, 22, 1470 doi: 10.1038/s41563-023-01704-z
[16]
Kim B J, Shao B, Hoang A T, et al. A flexible active-matrix X-ray detector with a backplane based on two-dimensional materials. Nat Electronics, 2025 doi: 10.1038/s41928-024-01317-7
[17]
van Breemen A J, Simon M, Tousignant O, et al. Curved digital X-ray detectors. npj Flex Electron, 2020, 4, 22 doi: 10.1038/s41528-020-00084-7
[18]
Piotrowski I, Kulcenty K, Suchorka W M, et al. Carcinogenesis induced by low-dose radiation. Radiol Oncol, 2017, 51, 369 doi: 10.1515/raon-2017-0044
Fig. 1.  (Color online) (a) Schematic diagram of flexible active-matrix X-ray detector based on 2D materials. (b) The I−V characteristics of the graphene/MoS2 photodetector under optical powers of 8.5 and 24.0 μW/cm2 (similar to the emission power of scintillators). (c) Schematic diagram of the scintillator and backplane integration device. (d) The functional relationship between X-ray tube voltage and output current based on graphene/MoS2 photodetector. (e) X-ray radiation stability of flexible X-ray detectors (72 mGy). (f) Uniformity of photocurrent and dark current based on flexible X-ray detectors. (g) Planar X-ray imaging and curved X-ray imaging based on flexible active-matrix X-ray detector toward the cylinder having a '+'-shaped hole[16].

[1]
Zhao J, Zhao L, Deng Y, et al. Perovskite-filled membranes for flexible and large-area direct-conversion X-ray detector arrays. Nat Photonics, 2020, 14, 612 doi: 10.1038/s41566-020-0678-x
[2]
He Y, Song J, Li M, et al. Perovskite computed tomography imager and three-dimensional reconstruction. Nat Photonics, 2024, 18, 1052 doi: 10.1038/s41566-024-01506-y
[3]
Wei H, Fang Y, Mulligan P, et al. Sensitive X-ray detectors made of methylammonium lead tribromide perovskite single crystals. Nat Photonics, 2016, 10, 333 doi: 10.1038/nphoton.2016.41
[4]
Kamiya T, Nomura K, Hosono H. Present status of amorphous In-Ga-Zn-O thin-film transistors. Sci Technol Adv Mater, 2010, 11, 044305 doi: 10.1088/1468-6996/11/4/044305
[5]
Li G, Wang Y, Huang L, et al. Research progress of high-sensitivity perovskite photodetectors: A review of photodetectors: noise, structure, and materials. ACS Appl Electron Mater, 2022, 4, 1485 doi: 10.1021/acsaelm.1c01349
[6]
Su Y, Ma W, Yang Y. Perovskite semiconductors for direct X-ray detection and imaging. J Semicond, 2020, 5, 051204 doi: 10.1088/1674-4926/41/5/051204
[7]
Yuan P, Zhang L, Zhu M, et al. Perovskite films for X-ray detection. J Semicond, 2022, 43, 070202. doi: 10.1088/1674-4926/43/7/070202
[8]
Li H, Song J, Pan W, et al. Sensitive and stable 2D perovskite single-crystal X-ray. Adv Mater, 2020, 32, 2003790 doi: 10.1002/adma.202003790
[9]
Kim Y, Kim K, Son D Y, et al. Printable organometallic perovskite enables large-area, low-dose X-ray imaging. Nature, 2017, 550, 87 doi: 10.1038/nature24032
[10]
Hwangbo S, Hu L, Hoang A T, et al. Wafer-scale monolithic integration of full-colour micro-LED display using MoS2 transistor. Nat Nanotechnol, 2022, 17, 500 doi: 10.1038/s41565-022-01102-7
[11]
Dodda A, Jayachandran D, Pannone A, et al. Active pixel sensor matrix based on monolayer MoS2 phototransistor array. Nat Mater, 2022, 21, 1379 doi: 10.1038/s41563-022-01398-9
[12]
Park Y J, Sharma B K, Shinde S M, et al. All MoS2-based large area, skin-attachable active-matrix tactile sensor. ACS Nano, 2019, 13, 3023 doi: 10.1021/acsnano.8b07995
[13]
Cui X, Lee G H, Kim Y, et al. Multi-terminal transport measurements of MoS2 using a van der Waals heterostructure device platform. Nat Nanotechnol, 2015, 10, 534 doi: 10.1038/nnano.2015.70
[14]
Choi C, Choi M K, Liu S, et al. Human eye-inspired soft optoelectronic device using high-density MoS2-graphene curved image sensor array. Nat Commun, 2017, 8, 1664 doi: 10.1038/s41467-017-01824-6
[15]
Kang J H, Shin H, Kim K S, et al. Monolithic 3D integration of 2D materials-based electronics towards ultimate edge computing solutions. Nat Mater, 2023, 22, 1470 doi: 10.1038/s41563-023-01704-z
[16]
Kim B J, Shao B, Hoang A T, et al. A flexible active-matrix X-ray detector with a backplane based on two-dimensional materials. Nat Electronics, 2025 doi: 10.1038/s41928-024-01317-7
[17]
van Breemen A J, Simon M, Tousignant O, et al. Curved digital X-ray detectors. npj Flex Electron, 2020, 4, 22 doi: 10.1038/s41528-020-00084-7
[18]
Piotrowski I, Kulcenty K, Suchorka W M, et al. Carcinogenesis induced by low-dose radiation. Radiol Oncol, 2017, 51, 369 doi: 10.1515/raon-2017-0044
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    Received: 08 February 2025 Revised: Online: Accepted Manuscript: 09 February 2025Uncorrected proof: 24 February 2025Published: 14 March 2025

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      Haixing Meng, Ying Li, Guozhen Shen. A flexible active-matrix X-ray detector based on two-dimensional material backplane[J]. Journal of Semiconductors, 2025, 46(3): 030402. doi: 10.1088/1674-4926/25020801 ****H X Meng, Y Li, and G Z Shen, A flexible active-matrix X-ray detector based on two-dimensional material backplane[J]. J. Semicond., 2025, 46(3), 030402 doi: 10.1088/1674-4926/25020801
      Citation:
      Haixing Meng, Ying Li, Guozhen Shen. A flexible active-matrix X-ray detector based on two-dimensional material backplane[J]. Journal of Semiconductors, 2025, 46(3): 030402. doi: 10.1088/1674-4926/25020801 ****
      H X Meng, Y Li, and G Z Shen, A flexible active-matrix X-ray detector based on two-dimensional material backplane[J]. J. Semicond., 2025, 46(3), 030402 doi: 10.1088/1674-4926/25020801

      A flexible active-matrix X-ray detector based on two-dimensional material backplane

      DOI: 10.1088/1674-4926/25020801
      CSTR: 32376.14.1674-4926.25020801
      More Information
      • Haixing Meng is a doctoral candidate at the School of Integrated Circuits and Electronics, Beijing Institute of Technology. His research interests focus encompass both indirect and direct X-ray detector
      • Ying Li received her Ph.D. degree in condensed matter physics at Zhengzhou University. Then, she worked at the Institute of Semiconductors, Chinese Academy of Sciences as a postdoctoral fellow, under the supervision of Professor Guozhen Shen. She is currently an associate professor of School of Integrated Circuits and Electronics, Beijing Institute of Technology. Her research interests relate to the perovskite-based optoelectronic devices for vision sensing
      • Guozhen Shen received his Ph.D. degree (2003) in Chemistry from University of Science and technology of China. He is currently a professor of School of Integrated Circuits and Electronics, Beijing Institute of Technology. His research focused on flexible electronics and printable electronics, including transistors, photodetectors, sensors and flexible energy storage and conversion devices
      • Corresponding author: liying0326@bit.edu.cngzshen@bit.edu.cn
      • Received Date: 2025-02-08
        Available Online: 2025-02-09

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