Fig. 1.
The structure of the sensor. (a) Whole structure. (b) Varistor distribution of the sensing structure.
DownLoad:
| Citation: |
Deqin Lian, Changde He, Hui Zhang, Jiaqi Yu, Kejing Yuan, Chenyang Xue. The design and test of MEMS piezoresistive ultrasonic sensor arrays[J]. Journal of Semiconductors, 2013, 34(3): 034007. doi: 10.1088/1674-4926/34/3/034007
****
D Q Lian, C D He, H Zhang, J Q Yu, K J Yuan, C Y Xue. The design and test of MEMS piezoresistive ultrasonic sensor arrays[J]. J. Semicond., 2013, 34(3): 034007. doi: 10.1088/1674-4926/34/3/034007.
|
The design and test of MEMS piezoresistive ultrasonic sensor arrays
DOI: 10.1088/1674-4926/34/3/034007
More Information
-
Abstract
The design, fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced. The consistency of the resonance frequency and the sensitivity of the array are tested. Moreover, we detect the directivity and the multi-target identification ability of the array. The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results. This paper analyzes this problem in detail and points out the direction of improvement. As for the directivity, the actual result is consistent with the theoretical one. The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72° when the distance between the sensor array and measured objects is 2 m. -
References
[1] Zhang Jinhong, Ma Jianqiang, Li Baoqing, et al. Structure design and characterization of MEMS piezoelectric ultrasonic transducer. Piezoelectrics & Acoust Optics, 2010, 32(4):604 http://en.cnki.com.cn/Article_en/CJFDTOTAL-YDSG201004025.htm[2] Wang Dajun, Li Huaijiang. Design of silicon piezoresistive pressure sensor chip based on MEMS technology. Journal of Jilin Normal University (Natural Science Edition), 2011, 2(2):133[3] Chen Shang, Xue Chenyang, Zhang Wendong, et al. Fabrication and testing of a silicon-based piezoresistive two-axis accelerometer. Nanotechnology and Precision Engineering, 2008, 6(4):272 http://en.cnki.com.cn/Article_en/CJFDTOTAL-NMJM200804008.htm[4] Qiao Hui, Liu Jun, Zhang Binzhen, et al. Design of a novel Si2 based bionic vector hydrophone based on piezoresistive effect. Chinese Journal of Sensors and Actuators, 2008, 21(2):301[5] Yuan Kejing, He Changde, Lian Deqin, et al. Designing of MEMS piezoresistive ultra transducer. Piezoelectrics & Acoust Optics, 2012, 34(5):728[6] Zhang Huixin. Design of MEMS-based piezoresistive micro-cantilever biosensor. Master Thesis of Tianjin University, 2007[7] Wooh S C, Shi Y. Optimum beam steering of linear phased arrays. Wave Motion, 1999, 29:245 doi: 10.1016/S0165-2125(98)00039-0[8] Feng Ruo, Yao Jinzhong, Guan Lixun. Ultrasonics handbook. Nanjing University Press, 2006:254[9] Wang Yangyuan, Wu Guoying, Hao Yilong, et al. Study of silicon-based MEMS technology and it's standard process. Acta Electronica Sinica, 2002, 30(11):1577[10] Wang Zhongyuan, Zhang Lingke. Rocket general firing table and test method of trajectory consistency. Science Press, 2008:3 -
Proportional views
