Chin. J. Semicond. > 2005, Volume 26 > Issue 4 > 730-734
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N-Al共掺ZnO薄膜的p型传导特性

吕建国 , 叶志镇 , 诸葛飞 , 曾昱嘉 , 赵炳辉 and 朱丽萍

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Key words: N-Al共掺ZnO薄膜, p型传导, N2O生长气氛, 直流反应磁控溅射

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(4): 730-734
      吕建国, 叶志镇, 诸葛飞, 曾昱嘉, 赵炳辉, 朱丽萍. N-Al共掺ZnO薄膜的p型传导特性[J]. 半导体学报(英文版), 2005, 26(4): 730-734.
      Citation:
      吕建国, 叶志镇, 诸葛飞, 曾昱嘉, 赵炳辉, 朱丽萍. N-Al共掺ZnO薄膜的p型传导特性[J]. 半导体学报(英文版), 2005, 26(4): 730-734.
      shu

      • Received Date: 2015-08-19

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