Chin. J. Semicond. > 2005, Volume 26 > Issue 4 > 830-834
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晶片表面几何特性对键合的影响

陈斌 , 黄永清 and 任晓敏

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Key words: 晶片键合, 表面能, 吸附能, 线性薄板理论

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(4): 830-834
      陈斌, 黄永清, 任晓敏. 晶片表面几何特性对键合的影响[J]. 半导体学报(英文版), 2005, 26(4): 830-834.
      Citation:
      陈斌, 黄永清, 任晓敏. 晶片表面几何特性对键合的影响[J]. 半导体学报(英文版), 2005, 26(4): 830-834.
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      • Received Date: 2015-08-19

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