Chin. J. Semicond. > 1998, Volume 19 > Issue 3 > 221-225
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CoSi_2超薄外延膜的生长研究

姚振钰 , 张国炳 , 秦复光 , 刘志凯 , 张建辉 and 林兰英

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1998

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      Article Navigation >  Journal of Semiconductors  > 1998  >  19(3): 221-225
      姚振钰, 张国炳, 秦复光, 刘志凯, 张建辉, 林兰英. CoSi_2超薄外延膜的生长研究[J]. 半导体学报(英文版), 1998, 19(3): 221-225.
      Citation:
      姚振钰, 张国炳, 秦复光, 刘志凯, 张建辉, 林兰英. CoSi_2超薄外延膜的生长研究[J]. 半导体学报(英文版), 1998, 19(3): 221-225.
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      • Received Date: 2015-08-20

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