Chin. J. Semicond. > 2004, Volume 25 > Issue 10 > 1277-1280
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一个描述硅原子团簇退火行为的模型

于民 , 黄如 , 张兴 , 王阳元 , Kunihiro Suzuki and Hideki Oka

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Key words: 退火, 缺陷, 硅, 模型

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(10): 1277-1280
      于民, 黄如, 张兴, 王阳元, Kunihiro Suzuki, Hideki Oka. 一个描述硅原子团簇退火行为的模型[J]. 半导体学报(英文版), 2004, 25(10): 1277-1280.
      Citation:
      于民, 黄如, 张兴, 王阳元, Kunihiro Suzuki, Hideki Oka. 一个描述硅原子团簇退火行为的模型[J]. 半导体学报(英文版), 2004, 25(10): 1277-1280.
      shu

      • Received Date: 2015-08-19

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