Chin. J. Semicond. > 2004, Volume 25 > Issue 9 > 1114-1117
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掺杂对硅薄膜窗口材料生长的影响

郭群超 , 耿新华 , 张建新 and 刘国标

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Key words: 窗口材料, 掺杂, 等离子体发光谱

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    Received: 19 August 2015 Revised: Online: Published: 01 September 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(9): 1114-1117
      郭群超, 耿新华, 张建新, 刘国标. 掺杂对硅薄膜窗口材料生长的影响[J]. 半导体学报(英文版), 2004, 25(9): 1114-1117.
      Citation:
      郭群超, 耿新华, 张建新, 刘国标. 掺杂对硅薄膜窗口材料生长的影响[J]. 半导体学报(英文版), 2004, 25(9): 1114-1117.
      shu

      • Received Date: 2015-08-19

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