Chin. J. Semicond. > 2004, Volume 25 > Issue 9 > 1109-1113
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Si基MOCVD生长AlN深陷阱中心研究

邓咏桢 , 郑有炓 , 周春红 , 孔月婵 , 陈鹏 , 叶建东 , 顾书林 , 沈波 , 张荣 , 江若琏 , 韩平 and 施毅

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Key words: Si基AlN, 深陷阱中心, PL谱

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    Received: 19 August 2015 Revised: Online: Published: 01 September 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(9): 1109-1113
      邓咏桢, 郑有炓, 周春红, 孔月婵, 陈鹏, 叶建东, 顾书林, 沈波, 张荣, 江若琏, 韩平, 施毅. Si基MOCVD生长AlN深陷阱中心研究[J]. 半导体学报(英文版), 2004, 25(9): 1109-1113.
      Citation:
      邓咏桢, 郑有炓, 周春红, 孔月婵, 陈鹏, 叶建东, 顾书林, 沈波, 张荣, 江若琏, 韩平, 施毅. Si基MOCVD生长AlN深陷阱中心研究[J]. 半导体学报(英文版), 2004, 25(9): 1109-1113.
      shu

      • Received Date: 2015-08-19

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