Chin. J. Semicond. > 1994, Volume 15 > Issue 8 > 573-576
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离子辐照对多孔硅性质的影响

杨海强，阎锋，官浩，鲍希茂

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(8): 573-576
      杨海强，阎锋，官浩，鲍希茂. 离子辐照对多孔硅性质的影响[J]. 半导体学报(英文版), 1994, 15(8): 573-576.
      Citation:
      杨海强，阎锋，官浩，鲍希茂. 离子辐照对多孔硅性质的影响[J]. 半导体学报(英文版), 1994, 15(8): 573-576.
      shu

      • Received Date: 2015-08-18

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