Chin. J. Semicond. > 1994, Volume 15 > Issue 8 > 569-572
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多孔化PECVD硅薄膜的室温光致发光

王燕，廖显伯，潘广勤，孔光临

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(8): 569-572
      王燕，廖显伯，潘广勤，孔光临. 多孔化PECVD硅薄膜的室温光致发光[J]. 半导体学报(英文版), 1994, 15(8): 569-572.
      Citation:
      王燕，廖显伯，潘广勤，孔光临. 多孔化PECVD硅薄膜的室温光致发光[J]. 半导体学报(英文版), 1994, 15(8): 569-572.
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      • Received Date: 2015-08-18

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