Chin. J. Semicond. > 2002, Volume 23 > Issue 7 > 707-712
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GaN/GaAs(001)外延薄膜的湿法腐蚀特性(英文)

沈晓明 , 冯志宏 , 冯淦 , 付羿 , 张宝顺 , 孙元平 , 张泽洪 and 杨辉

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Key words: 立方相GaN, MOVPE, 湿法腐蚀, 非对称性

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(7): 707-712
      沈晓明, 冯志宏, 冯淦, 付羿, 张宝顺, 孙元平, 张泽洪, 杨辉. GaN/GaAs(001)外延薄膜的湿法腐蚀特性(英文)[J]. 半导体学报(英文版), 2002, 23(7): 707-712.
      Citation:
      沈晓明, 冯志宏, 冯淦, 付羿, 张宝顺, 孙元平, 张泽洪, 杨辉. GaN/GaAs(001)外延薄膜的湿法腐蚀特性(英文)[J]. 半导体学报(英文版), 2002, 23(7): 707-712.
      shu

      • Received Date: 2015-08-19

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