Chin. J. Semicond. > 2000, Volume 21 > Issue 2 > 192-196
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基于神经网络方法的半导体生产工艺优化

王向东 , 陈咏梅 , 王守觉 and 石林初

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Key words: 半导体生产, 工艺优化, 神经网络

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(2): 192-196
      王向东, 陈咏梅, 王守觉, 石林初. 基于神经网络方法的半导体生产工艺优化[J]. 半导体学报(英文版), 2000, 21(2): 192-196.
      Citation:
      王向东, 陈咏梅, 王守觉, 石林初. 基于神经网络方法的半导体生产工艺优化[J]. 半导体学报(英文版), 2000, 21(2): 192-196.
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      • Received Date: 2015-08-20

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