Chin. J. Semicond. > 1988, Volume 9 > Issue 3 > 269-277
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二维离子注入的改进模型及数值模拟

徐晨曦 , 阮刚 and 王建伟

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(3): 269-277
      徐晨曦, 阮刚, 王建伟. 二维离子注入的改进模型及数值模拟[J]. 半导体学报(英文版), 1988, 9(3): 269-277.
      Citation:
      徐晨曦, 阮刚, 王建伟. 二维离子注入的改进模型及数值模拟[J]. 半导体学报(英文版), 1988, 9(3): 269-277.
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      • Received Date: 2015-08-19

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