Chin. J. Semicond. > 1994, Volume 15 > Issue 11 > 768-773
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硅各向异性腐蚀＜110＞条补偿图形腐蚀前沿控制

鲍敏杭，沈绍群，胡澄宇，马青华

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(11): 768-773
      鲍敏杭，沈绍群，胡澄宇，马青华. 硅各向异性腐蚀＜110＞条补偿图形腐蚀前沿控制[J]. 半导体学报(英文版), 1994, 15(11): 768-773.
      Citation:
      鲍敏杭，沈绍群，胡澄宇，马青华. 硅各向异性腐蚀＜110＞条补偿图形腐蚀前沿控制[J]. 半导体学报(英文版), 1994, 15(11): 768-773.
      shu

      • Received Date: 2015-08-19

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