Chin. J. Semicond. > 2001, Volume 22 > Issue 6 > 755-759

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Key words: 碳化硅, MOS电容

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2001

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      王姝睿, 刘忠立, 梁桂荣, 梁秀芹, 马红芝. N型6H-SiCMOS电容的电学特性[J]. 半导体学报(英文版), 2001, 22(6): 755-759.
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      王姝睿, 刘忠立, 梁桂荣, 梁秀芹, 马红芝. N型6H-SiCMOS电容的电学特性[J]. 半导体学报(英文版), 2001, 22(6): 755-759.

      • Received Date: 2015-08-20

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