Chin. J. Semicond. > 2004, Volume 25 > Issue 3 > 346-350
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中、低能离子注入中的剂量效应及模拟方法

施小康 , 于民 , 石浩 , 黄如 and 张兴

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Key words: 离子注入, 剂量效应, 模拟, 分子动力学

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    Received: 19 August 2015 Revised: Online: Published: 01 March 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(3): 346-350
      施小康, 于民, 石浩, 黄如, 张兴. 中、低能离子注入中的剂量效应及模拟方法[J]. 半导体学报(英文版), 2004, 25(3): 346-350.
      Citation:
      施小康, 于民, 石浩, 黄如, 张兴. 中、低能离子注入中的剂量效应及模拟方法[J]. 半导体学报(英文版), 2004, 25(3): 346-350.
      shu

      • Received Date: 2015-08-19

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