Chin. J. Semicond. > 1994, Volume 15 > Issue 6 > 388-392
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优质高阻异型厚层硅外延IGBT材料n~－／n~＋／p~＋

杨谟华，黎展荣

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(6): 388-392
      杨谟华，黎展荣. 优质高阻异型厚层硅外延IGBT材料n~－／n~＋／p~＋[J]. 半导体学报(英文版), 1994, 15(6): 388-392.
      Citation:
      杨谟华，黎展荣. 优质高阻异型厚层硅外延IGBT材料n~－／n~＋／p~＋[J]. 半导体学报(英文版), 1994, 15(6): 388-392.
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      • Received Date: 2015-08-18

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