Chin. J. Semicond. > 1994, Volume 15 > Issue 6 > 367-372

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氢等离子体对（Pt及其硅化物）／Si界面的杂质／缺陷态和势垒的影响

丁孙安，许振嘉

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(6): 367-372
      丁孙安，许振嘉. 氢等离子体对（Pt及其硅化物）／Si界面的杂质／缺陷态和势垒的影响[J]. 半导体学报(英文版), 1994, 15(6): 367-372.
      Citation:
      丁孙安，许振嘉. 氢等离子体对（Pt及其硅化物）／Si界面的杂质／缺陷态和势垒的影响[J]. 半导体学报(英文版), 1994, 15(6): 367-372.
      shu

      • Received Date: 2015-08-18

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