Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring

Lingchen Liu; Ying Yuan; Hao Xu; Xiaokun Qin; Xiaofeng Wang; Zheng Lou; Lili Wang

doi:10.1088/1674-4926/24110017

J. Semicond. > 2025, Volume 46 > Issue 4 > 042401

ARTICLES

Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring

Lingchen Liu^{1, 2}, Ying Yuan^{1, 3}, Hao Xu^1,, Xiaokun Qin^{1, 2}, Xiaofeng Wang^{1, 4}, Zheng Lou^{1, 2,} and Lili Wang^{1, 2,}

+ Author Affiliations

1. State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. Key Laboratory of Lignocellulosic Chemistry, College of Material Science and Technology, Beijing Forestry University, Beijing 100083, China
4. Sino-Russian International Joint Laboratory for Clean Energy and Energy Conversion Technology, College of Physics, Jilin University, Changchun 130012, China

Author Bio:

Lingchen Liu is a PhD candidate at the Institute of Semiconductors, Chinese Academy of Sciences. He earned his B.S. degree (2021) in Measurement and Control Technology and Instrument from the Jilin University. His current research interests focus on photoelectric sensors for novel computing architectures and flexible pressure sensors for human health monitoring.

Lili Wang is a professor in the Institute of Semiconductors, Chinese Academy of Sciences, China. She earned her B.S. degree in Chemistry and Ph.D. degree in Microelectronics and Solid State Electronics from Jilin University in 2014. Her current research interests focus on the semiconductor multimode intelligent sensing integrated system.

Corresponding author: Hao Xu, haoxu19@semi.ac.cn; Zheng Lou, zlou@semi.ac.cn; Lili Wang, liliwang@semi.ac.cn

DOI: 10.1088/1674-4926/24110017CSTR: 32376.14.1674-4926.24110017

Abstract: High-performance flexible pressure sensors have garnered significant attention in fields such as wearable electronics and human-machine interfaces. However, the development of flexible pressure sensors that simultaneously achieve high sensitivity, a wide detection range, and good mechanical stability remains a challenge. In this paper, we propose a flexible piezoresistive pressure sensor based on a Ti₃C₂Tx (MXene)/polyethylene oxide (PEO) composite nanofiber membrane (CNM). The sensor, utilizing MXene (0.4 wt%)/PEO (5 wt%), exhibits high sensitivity (44.34 kPa⁻¹ at 0−50 kPa, 12.99 kPa⁻¹ at 50−500 kPa) and can reliably monitor physiological signals and other subtle cues. Moreover, the sensor features a wide detection range (0−500 kPa), fast response and recovery time (~150/45 ms), and excellent mechanical stability (over 10 000 pressure cycles at maximum load). Through an MXene/PEO sensor array, we demonstrate its applications in human physiological signal monitoring, providing a reliable way to expand the application of MXene-based flexible pressure sensors.

Key words: flexible pressure sensor, wide detection range, high sensitivity, pulse wave detection

References

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[29]	Pei Y Y, Zhang X L, Hui Z Y, et al. Ti₃C₂TX MXene for sensing applications: Recent progress, design principles, and future perspectives. ACS Nano, 2021, 15, 3996 doi: 10.1021/acsnano.1c00248
[30]	Qin R Z, Nong J, Wang K Q, et al. Recent advances in flexible pressure sensors based on MXene materials. Adv Mater, 2024, 36, 2312761 doi: 10.1002/adma.202312761
[31]	Song Y, Min J H, Gao W. Wearable and implantable electronics: Moving toward precision therapy. ACS Nano, 2019, 13, 12280 doi: 10.1021/acsnano.9b08323
[32]	Liu S H, Liu L J, Pan K L, et al. Using the characteristics of pulse waveform to enhance the accuracy of blood pressure measurement by a multi-dimension regression model. Appl Sci, 2019, 9, 2922 doi: 10.3390/app9142922
[33]	Gurovich A N, Braith R W. Pulse wave analysis and pulse wave velocity techniques: Are they ready for the clinic? Hypertens Res, 2011, 34, 166 doi: 10.1038/hr.2010.217
[34]	McGill H C Jr, McMahan C A, Gidding S S. Preventing heart disease in the 21st century: Implications of the pathobiological determinants of atherosclerosis in youth (PDAY) study. Circulation, 2008, 117, 1216 doi: 10.1161/CIRCULATIONAHA.107.717033
[35]	Liu W J, Liu N S, Yue Y, et al. Piezoresistive pressure sensor based on synergistical innerconnect polyvinyl alcohol nanowires/wrinkled graphene film. Small, 2018, 14, 1704149 doi: 10.1002/smll.201704149
[36]	Zhang W G, Xiao Y, Duan Y, et al. A high-performance flexible pressure sensor realized by overhanging cobweb-like structure on a micropost array. ACS Appl Mater Interfaces, 2020, 12, 48938 doi: 10.1021/acsami.0c12369
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[38]	Du H T, Zhou H W, Wang M C, et al. Electrospun elastic films containing AgNW-bridged MXene networks as capacitive electronic skins. ACS Appl Mater Interfaces, 2022, 14, 31225 doi: 10.1021/acsami.2c04593
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[42]	He X, He X, He H L, et al. Large-scale, cuttable, full tissue-based capacitive pressure sensor for the detection of human physiological signals and pressure distribution. ACS Omega, 2021, 6, 27208 doi: 10.1021/acsomega.1c03900
[43]	Chen W F, Yan X. Progress in achieving high-performance piezoresistive and capacitive flexible pressure sensors: A review. J Mater Sci Technol, 2020, 43, 175 doi: 10.1016/j.jmst.2019.11.010
[44]	Qin R Z, Li X, Hu M J, et al. Preparation of high-performance MXene/PVA-based flexible pressure sensors with adjustable sensitivity and sensing range. Sens Actuat A Phys, 2022, 338, 113458 doi: 10.1016/j.sna.2022.113458
[45]	Pan L M, Han L Y, Liu H X, et al. Flexible sensor based on hair-like microstructured ionic hydrogel with high sensitivity for pulse wave detection. SSRN Journal, 2022, 450
[46]	Wu W T, Li L L, Li Z X, et al. Extensible integrated system for real-time monitoring of cardiovascular physiological signals and limb health. Adv Mater, 2023, 35, 2304596 doi: 10.1002/adma.202304596

Fig. 1. (Color online) Human health detection system based on MXene/PEO flexible sensors. (a) Schematic diagram of the pulse monitoring system based on MXene/PEO flexible pressure sensor. (b) Schematic diagram of the structure of the MXene/PEO flexible pressure sensor. (c) Schematic diagram of the comparison of sensing range and sensitivity of different pressure sensors.

DownLoad: Full-Size Img PowerPoint

Fig. 2. (Color online) Pressure response of the MXene/PEO flexible sensor. (a) Schematic diagram of the MXene/PEO sensor at no load and under load. (b) The minimum pressure detection limit of the sensor. (c) Dynamic pressure-sensitive response of the MXene/PEO flexible sensor at different pressure levels. (d) Response and recovery time of the MXene/PEO flexible sensor. (e) and (f) I−V curves of the MXene/PEO-based flexible sensor at different pressures. (g) The sensitivity curves of the MXene/PEO flexible sensor at different pressures range from 44.34 kPa⁻¹ at 0.10 to 50 kPa and 12.99 KPa⁻¹ at 50 to 500 kPa.

DownLoad: Full-Size Img PowerPoint

Fig. 3. (Color online) Preparation, characterization and mechanical properties testing of MXene/PEO CNM. (a) Schematic diagram of the fabrication process of MXene/PEO CNM-based pressure sensors. (b) Scanning electron microscopy (SEM) image of MXene/PEO CNM prepared using 4 wt% PEO. (c) SEM image of MXene/PEO CNM prepared using 5 wt% PEO. (d) Pressure-sensitive response diagram of MXene/PEO flexible sensor at different bending angles. (e) Stability of MXene/PEO flexible sensors.

DownLoad: Full-Size Img PowerPoint

Fig. 4. (Color online) Human pulse monitoring system based on MXene/PEO flexible sensors. (a) Schematic diagram of a human pulse monitoring system. (b) In the resting state, the pulse signal detected by the pulse monitoring system. (c) After exercise, the pulse monitoring system detects the pulse signal.

DownLoad: Full-Size Img PowerPoint

[1]	Li L L, Xu H, Li Z X, et al. 3D heterogeneous sensing system for multimode parrallel signal no-spatiotemporal misalignment recognition. Adv Mater, 2025, 37, 2414054 doi: 10.1002/adma.202414054
[2]	Qin X K, Zhong B W, Lv S X, et al. A zero-voltage-writing artificial nervous system based on biosensor integrated on ferroelectric tunnel junction. Adv Mater, 2024, 36, e2404026 doi: 10.1002/adma.202404026
[3]	Lei D D, Liu N S, Su T Y, et al. Roles of MXene in pressure sensing: Preparation, composite structure design, and mechanism. Adv Mater, 2022, 34, e2110608 doi: 10.1002/adma.202110608
[4]	Zhong B W, Qin X K, Xu H, et al. Interindividual- and blood-correlated sweat phenylalanine multimodal analytical biochips for tracking exercise metabolism. Nat Commun, 2024, 15, 624 doi: 10.1038/s41467-024-44751-z
[5]	Guan R Q, Xu H, Lou Z, et al. Metamaterials for high-performance smart sensors. Appl Phys Rev, 2024, 11, 041327 doi: 10.1063/5.0232606
[6]	Luo J B, Sun C Y, Chang B Y, et al. MXene-enabled self-adaptive hydrogel interface for active electroencephalogram interactions. ACS Nano, 2022, 16, 19373 doi: 10.1021/acsnano.2c08961
[7]	Jian M Q, Xia K L, Wang Q, et al. Flexible and highly sensitive pressure sensors based on bionic hierarchical structures. Adv Funct Mater, 2017, 27, 1606066 doi: 10.1002/adfm.201606066
[8]	Wei C H, Cheng R W, Ning C, et al. A self-powered body motion sensing network integrated with multiple triboelectric fabrics for biometric gait recognition and auxiliary rehabilitation training. Adv Funct Mater, 2023, 33, 2303562 doi: 10.1002/adfm.202303562
[9]	Ning C, Cheng R W, Jiang Y, et al. Helical fiber strain sensors based on triboelectric nanogenerators for self-powered human respiratory monitoring. ACS Nano, 2022, 16, 2811 doi: 10.1021/acsnano.1c09792
[10]	Sun C Y, Luo J B, Jia T X, et al. Water-resistant and underwater adhesive ion-conducting gel for motion-robust bioelectric monitoring. Chem Eng J, 2022, 431, 134012 doi: 10.1016/j.cej.2021.134012
[11]	Ren M N, Sun Z S, Zhang M Q, et al. A high-performance wearable pressure sensor based on an MXene/PVP composite nanofiber membrane for health monitoring. Nanoscale Adv, 2022, 4, 3987 doi: 10.1039/D2NA00339B
[12]	Ma Y N, Liu N S, Li L Y, et al. A highly flexible and sensitive piezoresistive sensor based on MXene with greatly changed interlayer distances. Nat Commun, 2017, 8, 1207 doi: 10.1038/s41467-017-01136-9
[13]	Su Z M, Chen H T, Song Y, et al. Microsphere-assisted robust epidermal strain gauge for static and dynamic gesture recognition. Small, 2017, 13, 1702108 doi: 10.1002/smll.201702108
[14]	Sadiq H, Hui H, Huang S, et al. A flexible pressure sensor based on PDMS-CNTs film for multiple applications. IEEE Sens J, 2022, 22, 3033 doi: 10.1109/JSEN.2021.3114379
[15]	Mo F N, Huang Y, Li Q, et al. A highly stable and durable capacitive strain sensor based on dynamically super-tough hydro/organo-gels. Adv Funct Mater, 2021, 31, 2010830 doi: 10.1002/adfm.202010830
[16]	Cho S H, Lee S W, Yu S, et al. Micropatterned pyramidal ionic gels for sensing broad-range pressures with high sensitivity. ACS Appl Mater Interfaces, 2017, 9, 10128 doi: 10.1021/acsami.7b00398
[17]	Qiu H J, Fang G, Wen Y R, et al. Nanoporous high-entropy alloys for highly stable and efficient catalysts. J Mater Chem A, 2019, 7, 6499 doi: 10.1039/C9TA00505F
[18]	Li Z X, Xu H, Zheng Y Q, et al. A reconfigurable heterostructure transistor array for monocular 3D parallax reconstructuion. Nat Electron, 2025, 8, 46 doi: 10.1038/s41928-024-01261-6
[19]	Yang D, Guo H Y, Chen X Y, et al. A flexible and wide pressure range triboelectric sensor array for real-time pressure detection and distribution mapping. J Mater Chem A, 2020, 8, 23827 doi: 10.1039/D0TA08223F
[20]	Guzelturk B, Erdem O, Olutas M, et al. Stacking in colloidal nanoplatelets: Tuning excitonic properties. ACS Nano, 2014, 8, 12524 doi: 10.1021/nn5053734
[21]	Dong K, Peng X, An J, et al. Shape adaptable and highly resilient 3D braided triboelectric nanogenerators as e-textiles for power and sensing. Nat Commun, 2020, 11, 2868 doi: 10.1038/s41467-020-16642-6
[22]	Yang W F, Gong W, Hou C Y, et al. All-fiber tribo-ferroelectric synergistic electronics with high thermal-moisture stability and comfortability. Nat Commun, 2019, 10, 5541 doi: 10.1038/s41467-019-13569-5
[23]	Zhao Y J, Liu J Z, Horn M, et al. Recent advancements in metal organic framework based electrodes for supercapacitors. Sci China Mater, 2018, 61, 159 doi: 10.1007/s40843-017-9153-x
[24]	VahidMohammadi A, Rosen J, Gogotsi Y. The world of two-dimensional carbides and nitrides (MXenes). Science, 2021, 372, eabf1581 doi: 10.1126/science.abf1581
[25]	Ghidiu M, Lukatskaya M R, Zhao M Q, et al. Conductive two-dimensional titanium carbide 'clay' with high volumetric capacitance. Nature, 2014, 516, 78 doi: 10.1038/nature13970
[26]	Mao M, Yu K X, Cao C F, et al. Facile and green fabrication of flame-retardant Ti3C2Tx MXene networks for ultrafast, reusable and weather-resistant fire warning. Chem Eng J, 2022, 427, 131615 doi: 10.1016/j.cej.2021.131615
[27]	Xu J X, Peng T, Qin X, et al. Recent advances in 2D MXenes: Preparation, intercalation and applications in flexible devices. J Mater Chem A, 2021, 9, 14147 doi: 10.1039/D1TA03070A
[28]	Ho D H, Choi Y Y, Jo S B, et al. Sensing with MXenes: Progress and prospects. Adv Mater, 2021, 33, 2005846 doi: 10.1002/adma.202005846
[29]	Pei Y Y, Zhang X L, Hui Z Y, et al. Ti₃C₂TX MXene for sensing applications: Recent progress, design principles, and future perspectives. ACS Nano, 2021, 15, 3996 doi: 10.1021/acsnano.1c00248
[30]	Qin R Z, Nong J, Wang K Q, et al. Recent advances in flexible pressure sensors based on MXene materials. Adv Mater, 2024, 36, 2312761 doi: 10.1002/adma.202312761
[31]	Song Y, Min J H, Gao W. Wearable and implantable electronics: Moving toward precision therapy. ACS Nano, 2019, 13, 12280 doi: 10.1021/acsnano.9b08323
[32]	Liu S H, Liu L J, Pan K L, et al. Using the characteristics of pulse waveform to enhance the accuracy of blood pressure measurement by a multi-dimension regression model. Appl Sci, 2019, 9, 2922 doi: 10.3390/app9142922
[33]	Gurovich A N, Braith R W. Pulse wave analysis and pulse wave velocity techniques: Are they ready for the clinic? Hypertens Res, 2011, 34, 166 doi: 10.1038/hr.2010.217
[34]	McGill H C Jr, McMahan C A, Gidding S S. Preventing heart disease in the 21st century: Implications of the pathobiological determinants of atherosclerosis in youth (PDAY) study. Circulation, 2008, 117, 1216 doi: 10.1161/CIRCULATIONAHA.107.717033
[35]	Liu W J, Liu N S, Yue Y, et al. Piezoresistive pressure sensor based on synergistical innerconnect polyvinyl alcohol nanowires/wrinkled graphene film. Small, 2018, 14, 1704149 doi: 10.1002/smll.201704149
[36]	Zhang W G, Xiao Y, Duan Y, et al. A high-performance flexible pressure sensor realized by overhanging cobweb-like structure on a micropost array. ACS Appl Mater Interfaces, 2020, 12, 48938 doi: 10.1021/acsami.0c12369
[37]	Guo Y, Zhong M J, Fang Z W, et al. A wearable transient pressure sensor made with MXene nanosheets for sensitive broad-range human–machine interfacing. Nano Lett, 2019, 19, 1143 doi: 10.1021/acs.nanolett.8b04514
[38]	Du H T, Zhou H W, Wang M C, et al. Electrospun elastic films containing AgNW-bridged MXene networks as capacitive electronic skins. ACS Appl Mater Interfaces, 2022, 14, 31225 doi: 10.1021/acsami.2c04593
[39]	Shen X Q, Li M D, Ma J P, et al. Skin-inspired pressure sensor with MXene/P(VDF-TrFE-CFE) as active layer for wearable electronics. Nanomaterials, 2021, 11, 716 doi: 10.3390/nano11030716
[40]	Qin R Z, Hu M J, Li X, et al. A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor. Microsyst Nanoeng, 2021, 7, 100 doi: 10.1038/s41378-021-00327-1
[41]	Liu Z H, Liang T L, Xin Y, et al. Natural bamboo leaves as dielectric layers for flexible capacitive pressure sensors with adjustable sensitivity and a broad detection range. RSC Adv, 2021, 11, 17291 doi: 10.1039/D1RA03207K
[42]	He X, He X, He H L, et al. Large-scale, cuttable, full tissue-based capacitive pressure sensor for the detection of human physiological signals and pressure distribution. ACS Omega, 2021, 6, 27208 doi: 10.1021/acsomega.1c03900
[43]	Chen W F, Yan X. Progress in achieving high-performance piezoresistive and capacitive flexible pressure sensors: A review. J Mater Sci Technol, 2020, 43, 175 doi: 10.1016/j.jmst.2019.11.010
[44]	Qin R Z, Li X, Hu M J, et al. Preparation of high-performance MXene/PVA-based flexible pressure sensors with adjustable sensitivity and sensing range. Sens Actuat A Phys, 2022, 338, 113458 doi: 10.1016/j.sna.2022.113458
[45]	Pan L M, Han L Y, Liu H X, et al. Flexible sensor based on hair-like microstructured ionic hydrogel with high sensitivity for pulse wave detection. SSRN Journal, 2022, 450
[46]	Wu W T, Li L L, Li Z X, et al. Extensible integrated system for real-time monitoring of cardiovascular physiological signals and limb health. Adv Mater, 2023, 35, 2304596 doi: 10.1002/adma.202304596

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Received: 17 November 2024 Revised: 16 December 2024 Online: Accepted Manuscript: 07 January 2025Uncorrected proof: 08 February 2025Published: 10 April 2025

Article Navigation > Journal of Semiconductors > 2025 > 46(4): 042401

Lingchen Liu, Ying Yuan, Hao Xu, Xiaokun Qin, Xiaofeng Wang, Zheng Lou, Lili Wang. Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring[J]. Journal of Semiconductors, 2025, 46(4): 042401. doi: 10.1088/1674-4926/24110017 ****L C Liu, Y Yuan, H Xu, X K Qin, X F Wang, Z Lou, and L L Wang, Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring[J]. J. Semicond., 2025, 46(4), 042401 doi: 10.1088/1674-4926/24110017

Citation:

L C Liu, Y Yuan, H Xu, X K Qin, X F Wang, Z Lou, and L L Wang, Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring[J]. J. Semicond., 2025, 46(4), 042401 doi: 10.1088/1674-4926/24110017

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Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring

DOI: 10.1088/1674-4926/24110017

CSTR: 32376.14.1674-4926.24110017

Lingchen Liu^{1, 2},
Ying Yuan^{1, 3},
Hao Xu^1,,
Xiaokun Qin^{1, 2},
Xiaofeng Wang^{1, 4},
Zheng Lou^{1, 2,},
Lili Wang^{1, 2,}

1.
State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2.
Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3.
Key Laboratory of Lignocellulosic Chemistry, College of Material Science and Technology, Beijing Forestry University, Beijing 100083, China
4.
Sino-Russian International Joint Laboratory for Clean Energy and Energy Conversion Technology, College of Physics, Jilin University, Changchun 130012, China

More Information

Lingchen Liu is a PhD candidate at the Institute of Semiconductors, Chinese Academy of Sciences. He earned his B.S. degree (2021) in Measurement and Control Technology and Instrument from the Jilin University. His current research interests focus on photoelectric sensors for novel computing architectures and flexible pressure sensors for human health monitoring
Lili Wang is a professor in the Institute of Semiconductors, Chinese Academy of Sciences, China. She earned her B.S. degree in Chemistry and Ph.D. degree in Microelectronics and Solid State Electronics from Jilin University in 2014. Her current research interests focus on the semiconductor multimode intelligent sensing integrated system
Corresponding author: haoxu19@semi.ac.cn; zlou@semi.ac.cn; liliwang@semi.ac.cn
Received Date: 2024-11-17
Revised Date: 2024-12-16

Available Online: 2025-01-07

Abstract

Abstract

High-performance flexible pressure sensors have garnered significant attention in fields such as wearable electronics and human-machine interfaces. However, the development of flexible pressure sensors that simultaneously achieve high sensitivity, a wide detection range, and good mechanical stability remains a challenge. In this paper, we propose a flexible piezoresistive pressure sensor based on a Ti₃C₂Tx (MXene)/polyethylene oxide (PEO) composite nanofiber membrane (CNM). The sensor, utilizing MXene (0.4 wt%)/PEO (5 wt%), exhibits high sensitivity (44.34 kPa⁻¹ at 0−50 kPa, 12.99 kPa⁻¹ at 50−500 kPa) and can reliably monitor physiological signals and other subtle cues. Moreover, the sensor features a wide detection range (0−500 kPa), fast response and recovery time (~150/45 ms), and excellent mechanical stability (over 10 000 pressure cycles at maximum load). Through an MXene/PEO sensor array, we demonstrate its applications in human physiological signal monitoring, providing a reliable way to expand the application of MXene-based flexible pressure sensors.
- flexible pressure sensor,
- wide detection range,
- high sensitivity,
- pulse wave detection

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