Abstract: ZnO films and ZnO:Cu diluted magnetic semiconductor films were prepared by radio frequency mag-netron sputtering on Si (111) substrates, with targets of ZnO and Zn0.99Cu0.01, respectively. The plasma emission spectra were analyzed by using a grating monochromator during sputtering. The X-ray photoelectron spectroscopy measurements indicate the existence of Znidefect in the films, and the valence state of Cu is 1+. The X-ray diffrac-tion measurements indicate that the thin films have a hexagonal wurtzite structure and have a preferred orientation along thec-axis. The vibrating sample magnetometer measurements indicate that the sample is ferromagnetic at room temperature, and the origin of the magnetic behavior of the samples is discussed.

Key words: RF magnetron sputtering