Abstract: This paper proposes a simple method of measuring differentially-excited on-wafer RF CMOS spiral inductor-like components. This method requires only two common ‘G-S-G’ probes and an ordinary two-port VNA. Using a network instead of a detailed equivalent circuit, this method completes the de-embedding with only one ‘Through’ dummy, and thus the measurements are greatly simplified. By designing the ports ‘Open’ or ‘Short-circuited’ deliberately, a multi-port transformer can be transformed into three two-port networks with different terminators. Then, couplings between the two coils can be solved, and the differentially-excited scattering parameters (S-parameters) can be constructed. Also, a group of differential inductors and transformers were designed and measured, and then comparisons between simulated and measured electromagnetic results are performed to verify this method.

Key words: on-wafer,  differentially-excited,  de-embedding,  two-port network,  S -parameter