A simple method of measuring differentially-excited on-wafer spiral inductor-like components

Pan Jie; Yang Haigang; Yang Liwu

doi:10.1088/1674-4926/30/7/074006

J. Semicond. > 2009, Volume 30 > Issue 7 > 074006

SEMICONDUCTOR DEVICES

A simple method of measuring differentially-excited on-wafer spiral inductor-like components

Pan Jie, Yang Haigang and Yang Liwu

+ Author Affiliations

DOI: 10.1088/1674-4926/30/7/074006

Abstract: This paper proposes a simple method of measuring differentially-excited on-wafer RF CMOS spiral inductor-like components. This method requires only two common ‘G-S-G’ probes and an ordinary two-port VNA. Using a network instead of a detailed equivalent circuit, this method completes the de-embedding with only one ‘Through’ dummy, and thus the measurements are greatly simplified. By designing the ports ‘Open’ or ‘Short-circuited’ deliberately, a multi-port transformer can be transformed into three two-port networks with different terminators. Then, couplings between the two coils can be solved, and the differentially-excited scattering parameters (S-parameters) can be constructed. Also, a group of differential inductors and transformers were designed and measured, and then comparisons between simulated and measured electromagnetic results are performed to verify this method.

Key words: on-wafer, differentially-excited, de-embedding, two-port network, S -parameter

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Pan Jie, Yang Haigang, Yang Liwu. A simple method of measuring differentially-excited on-wafer spiral inductor-like components[J]. Journal of Semiconductors, 2009, 30(7): 074006. doi: 10.1088/1674-4926/30/7/074006

Pan J, Yang H G, Yang L W. A simple method of measuring differentially-excited on-wafer spiral inductor-like components[J]. J. Semicond., 2009, 30(7): 074006. doi: 10.1088/1674-4926/30/7/074006.

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Received: 18 August 2015 Revised: 27 February 2009 Online: Published: 01 July 2009

This paper proposes a simple method of measuring differentially-excited on-wafer RF CMOS spiral inductor-like components. This method requires only two common ‘G-S-G’ probes and an ordinary two-port VNA. Using a network instead of a detailed equivalent circuit, this method completes the de-embedding with only one ‘Through’ dummy, and thus the measurements are greatly simplified. By designing the ports ‘Open’ or ‘Short-circuited’ deliberately, a multi-port transformer can be transformed into three two-port networks with different terminators. Then, couplings between the two coils can be solved, and the differentially-excited scattering parameters (S-parameters) can be constructed. Also, a group of differential inductors and transformers were designed and measured, and then comparisons between simulated and measured electromagnetic results are performed to verify this method.

A simple method of measuring differentially-excited on-wafer spiral inductor-like components

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