J. Semicond. > 2011, Volume 32 > Issue 10 > 105002

SEMICONDUCTOR INTEGRATED CIRCUITS

Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant

Qiu Yingping, Wang Yang, Shao Yongbo, Zhou Daibing, Liang Song, Zhao Lingjuan and Wang Wei

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DOI: 10.1088/1674-4926/32/10/105002

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Abstract: A novel lumped electro-absorption modulator with a charge layer and an undercut ridge waveguide (DU-EAM) was fabricated and measured. Also, two other kinds of \,EAM with straight ridge waveguides, one with a charge layer (D-EAM) and another with no charge layer (N-EAM), were fabricated and tested to ensure that the design of the DU-EAM would reduce the RC-time constant. The measured capacitance of the D-EAM and the DU-EAM is lower than that of the N-EAM under reverse bias voltage from -1 to -8 V due to the inserted charge layer. The capacitances of the N-EAM, the D-EAM and the DU-EAM are 0.375, 0.225 and 0.325 pF, respectively, at -3 V. In addition, the DU-EAM had a larger extinction ratio (25 dB at -3 V) and higher modulation efficiency (13 dB/V between -1 and -2 V) than two other straight-ridge-waveguide ones (the D-EAM performed 22 dB and 10 dB/V, the N-EAM performed 20 dB and 10 dB/V) due to the 5.2 μm wider active region.

Key words: undercut waveguide

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    Received: 20 August 2015 Revised: 04 May 2011 Online: Published: 01 October 2011

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      Qiu Yingping, Wang Yang, Shao Yongbo, Zhou Daibing, Liang Song, Zhao Lingjuan, Wang Wei. Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant[J]. Journal of Semiconductors, 2011, 32(10): 105002. doi: 10.1088/1674-4926/32/10/105002 ****Qiu Y P, Wang Y, Shao Y B, Zhou D B, Liang S, Zhao L J, Wang W. Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant[J]. J. Semicond., 2011, 32(10): 105002. doi: 10.1088/1674-4926/32/10/105002.
      Citation:
      Qiu Yingping, Wang Yang, Shao Yongbo, Zhou Daibing, Liang Song, Zhao Lingjuan, Wang Wei. Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant[J]. Journal of Semiconductors, 2011, 32(10): 105002. doi: 10.1088/1674-4926/32/10/105002 ****
      Qiu Y P, Wang Y, Shao Y B, Zhou D B, Liang S, Zhao L J, Wang W. Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant[J]. J. Semicond., 2011, 32(10): 105002. doi: 10.1088/1674-4926/32/10/105002.

      Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant

      DOI: 10.1088/1674-4926/32/10/105002
      Funds:

      National 973 Program (Grant No 2011CB301702)

      • Received Date: 2015-08-20
      • Accepted Date: 2011-04-13
      • Revised Date: 2011-05-04
      • Published Date: 2011-09-20

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