J. Semicond. > 2013, Volume 34 > Issue 6 > 063004

SEMICONDUCTOR MATERIALS

Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications

Zhifang Lei, Guangyu Chen, Shibin Gu, Lingling Dai, Rong Yang, Yuan Meng, Ted Guo and Liwei Li

+ Author Affiliations

 Corresponding author: Li Liwei, Email:liliwei@enn.cn

DOI: 10.1088/1674-4926/34/6/063004

PDF

Abstract: This study deals with the optimization of direct current (DC) sputtered aluminum-doped zinc oxide (AZO) thin films and their incorporation into a-Si:H/μc-Si:H tandem junction thin film solar cells aiming for high conversion efficiency. Electrical and optical properties of AZO films, i.e. mobility, carrier density, resistivity, and transmittance, were comprehensively characterized and analyzed by varying sputtering deposition conditions, including chamber pressure, substrate temperature, and sputtering power. The correlations between sputtering processes and AZO thin film properties were first investigated. Then, the AZO films were textured by diluted hydrochloric acid wet etching. Through optimization of deposition and texturing processes, AZO films yield excellent electrical and optical properties with a high transmittance above 81% over the 380-1100 nm wavelength range, low sheet resistance of 11 Ω/$\square$ and high haze ratio of 41.3%. In preliminary experiments, the AZO films were applied to a-Si:H/μc-Si:H tandem thin film solar cells as front contact electrodes, resulting in an initial conversion efficiency of 12.5% with good current matching between subcells.

Key words: aluminum-doped zinc oxidemagnetron sputteringtandem silicon thin film solar cell



[1]
Kuo S Y, Chen W C, Lai F I, et al. Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films. J Cryst Growth, 2006, 287:78 doi: 10.1016/j.jcrysgro.2005.10.047
[2]
Lee K E, Wang M, Kim E J, et al. Structural, electrical and optical properties of sol-gel AZO thin films. Curr Appl Phys, 2009, 9:683 doi: 10.1016/j.cap.2008.06.006
[3]
Elm M T, Henning T, Klar P J, et al. Effects of artificially structured micrometer holes on the transport behavior of Al-doped ZnO layers. Appl Phys Lett, 2008, 93:232101 doi: 10.1063/1.3040312
[4]
Jung K, Choi W K, Yoon S J, et al. Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread. Appl Surf Sci, 2010, 256:6219 doi: 10.1016/j.apsusc.2010.03.144
[5]
Yang W F, Liu Z G, Zhang F, et al. Structural, electrical, and optical properties of transparent conductive Al-doped ZnO films prepared by RF magnetron sputtering. Journal of Semiconductors, 2008, 29:2311 http://www.jos.ac.cn/bdtxbcn/ch/reader/view_abstract_new.aspx?volume=29&start_page=2311
[6]
Agashe C, Kluth O, Schope G, et al. Modified Thornton model for magnetron sputtered zinc oxide:film structure and etching behaviour. Thin solid films, 2003, 442:80 doi: 10.1016/S0040-6090(03)00949-0
[7]
Calnan S, Hupkes J, Rech B, et al. High deposition rate aluminum-doped zinc films with highly efficient light trapping for silicon thin film solar cells. Thin solid films, 2008, 516:1242 doi: 10.1016/j.tsf.2007.06.006
[8]
Ellmer K. Magnetron sputtering of transparent conductive zinc oxide:relation between the sputtering parameters and the electronic properties. J Phys D Appl Phys, 2000, 33:17 doi: 10.1088/0022-3727/33/4/201
[9]
Zhang H F, Yang S G, Liu H F, et al. Preparation and characterization of transparent conducting ZnO:W films by DC magnetron sputtering. Journal of Semiconductors, 2011, 32:043002 doi: 10.1088/1674-4926/32/4/043002
[10]
Hooh J, Kim K K, Seong T Y. Effects of deposition temperatures and annealing conditions on the microstructural, electrical and optical properties of polycrystalline Al-doped ZnO thin films. Appl Surf Sci, 2011, 257:2731 doi: 10.1016/j.apsusc.2010.10.053
[11]
Zhou H B, Zhang H Y, Tan M L, et al. Effects of substrate temperature on the efficiency of hydrogen incorporation on the properties of Al-doped ZnO films. Superlattice Microst, 2012, 51:644 doi: 10.1016/j.spmi.2012.03.003
[12]
Moon Y K, Bang B, Kim S H, et al. Effects of working pressure on the electrical and optical properties of aluminum-doped zinc oxide thin films. J Mater Sci-Mater El, 2008, 19:528 doi: 10.1007/s10854-007-9375-5
[13]
Kar J P, Kin S, Shin B, et al. Influence of sputtering pressure on morphological, mechanical and electrical properties of Al-doped ZnO films. Solid State Electron, 2010, 54:1447 doi: 10.1016/j.sse.2010.07.002
[14]
Shin B K, Lee T I, Kar J P, et al. Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target. Mat Sci Semicon Proc, 2011, 14:23 doi: 10.1016/j.mssp.2010.12.013
[15]
Kuo S Y, Liu K C, Lai F I, et al. Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films. Microelectron Reliab, 2010, 50:730 doi: 10.1016/j.microrel.2010.01.042
[16]
Rech B, Remann T, Donker M N, et al. Challenges in microcrystalline silicon based solar cell technology. Thin Solid Films, 2006, 511/512:548 doi: 10.1016/j.tsf.2005.12.161
[17]
Chang P K, Lu C H, Yeh C H, et al. High efficiency a-Si:H/a-Si:H solar cell with a tunnel recombination junction and a n-type μ c-Si:H layer. Thin Solid Films, 2012, 520:3684 doi: 10.1016/j.tsf.2011.12.083
Fig. 1.  X-ray diffraction pattern for the AZO film.

Fig. 2.  (a) Carrier concentration ($n$), Hall mobility ($\mu$), and electrical resistivity ($\rho$) versus deposition temperature. (b) Spectral transmittance versus deposition temperature.

Fig. 3.  (a) Carrier concentration ($n$), Hall mobility ($\mu$) and electrical resistivity ($\rho$) versus sputtering pressure. (b) Spectral transmittance versus sputtering pressure. (Deposition temperature and sputtering power were fixed, and AZO thickness is $\sim$860 nm).

Fig. 4.  (a) Carrier concentration ($n$), Hall mobility ($\mu$) and electrical resistivity ($\rho$) versus sputtering power. (b) Spectral transmittance versus sputtering power (Deposition temperature and sputtering pressure were fixed, and AZO thickness is $\sim$860 nm).

Fig. 5.  Haze ratio (average over 380-760 nm) variation of post etched AZO films in 0.3% HCl with different etching time at room temperature.

Fig. 6.  Effects of HCl concentration on the haze ratio (average over 380-760 nm) and etching rate (room temperature, 20 s).

Fig. 7.  Effects of etching temperature on the haze ratio (average over 380-760 nm) and etching rate (0.5% HCl concentration, 20 s).

Fig. 8.  (a) Optical and electrical properties and (b) AFM image of the textured AZO.

Fig. 9.  $I$-$V$ curve of the a-Si:H/μc-Si:H thin film solar cell.

Fig. 10.  QE of the a-Si:H/$\mu$c-Si:H thin film solar cell.

[1]
Kuo S Y, Chen W C, Lai F I, et al. Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films. J Cryst Growth, 2006, 287:78 doi: 10.1016/j.jcrysgro.2005.10.047
[2]
Lee K E, Wang M, Kim E J, et al. Structural, electrical and optical properties of sol-gel AZO thin films. Curr Appl Phys, 2009, 9:683 doi: 10.1016/j.cap.2008.06.006
[3]
Elm M T, Henning T, Klar P J, et al. Effects of artificially structured micrometer holes on the transport behavior of Al-doped ZnO layers. Appl Phys Lett, 2008, 93:232101 doi: 10.1063/1.3040312
[4]
Jung K, Choi W K, Yoon S J, et al. Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread. Appl Surf Sci, 2010, 256:6219 doi: 10.1016/j.apsusc.2010.03.144
[5]
Yang W F, Liu Z G, Zhang F, et al. Structural, electrical, and optical properties of transparent conductive Al-doped ZnO films prepared by RF magnetron sputtering. Journal of Semiconductors, 2008, 29:2311 http://www.jos.ac.cn/bdtxbcn/ch/reader/view_abstract_new.aspx?volume=29&start_page=2311
[6]
Agashe C, Kluth O, Schope G, et al. Modified Thornton model for magnetron sputtered zinc oxide:film structure and etching behaviour. Thin solid films, 2003, 442:80 doi: 10.1016/S0040-6090(03)00949-0
[7]
Calnan S, Hupkes J, Rech B, et al. High deposition rate aluminum-doped zinc films with highly efficient light trapping for silicon thin film solar cells. Thin solid films, 2008, 516:1242 doi: 10.1016/j.tsf.2007.06.006
[8]
Ellmer K. Magnetron sputtering of transparent conductive zinc oxide:relation between the sputtering parameters and the electronic properties. J Phys D Appl Phys, 2000, 33:17 doi: 10.1088/0022-3727/33/4/201
[9]
Zhang H F, Yang S G, Liu H F, et al. Preparation and characterization of transparent conducting ZnO:W films by DC magnetron sputtering. Journal of Semiconductors, 2011, 32:043002 doi: 10.1088/1674-4926/32/4/043002
[10]
Hooh J, Kim K K, Seong T Y. Effects of deposition temperatures and annealing conditions on the microstructural, electrical and optical properties of polycrystalline Al-doped ZnO thin films. Appl Surf Sci, 2011, 257:2731 doi: 10.1016/j.apsusc.2010.10.053
[11]
Zhou H B, Zhang H Y, Tan M L, et al. Effects of substrate temperature on the efficiency of hydrogen incorporation on the properties of Al-doped ZnO films. Superlattice Microst, 2012, 51:644 doi: 10.1016/j.spmi.2012.03.003
[12]
Moon Y K, Bang B, Kim S H, et al. Effects of working pressure on the electrical and optical properties of aluminum-doped zinc oxide thin films. J Mater Sci-Mater El, 2008, 19:528 doi: 10.1007/s10854-007-9375-5
[13]
Kar J P, Kin S, Shin B, et al. Influence of sputtering pressure on morphological, mechanical and electrical properties of Al-doped ZnO films. Solid State Electron, 2010, 54:1447 doi: 10.1016/j.sse.2010.07.002
[14]
Shin B K, Lee T I, Kar J P, et al. Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target. Mat Sci Semicon Proc, 2011, 14:23 doi: 10.1016/j.mssp.2010.12.013
[15]
Kuo S Y, Liu K C, Lai F I, et al. Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films. Microelectron Reliab, 2010, 50:730 doi: 10.1016/j.microrel.2010.01.042
[16]
Rech B, Remann T, Donker M N, et al. Challenges in microcrystalline silicon based solar cell technology. Thin Solid Films, 2006, 511/512:548 doi: 10.1016/j.tsf.2005.12.161
[17]
Chang P K, Lu C H, Yeh C H, et al. High efficiency a-Si:H/a-Si:H solar cell with a tunnel recombination junction and a n-type μ c-Si:H layer. Thin Solid Films, 2012, 520:3684 doi: 10.1016/j.tsf.2011.12.083
1

Magnetron sputtering NiOx for perovskite solar cells

Xiangyi Shen, Xinwu Ke, Yingdong Xia, Qingxun Guo, Yonghua Chen, et al.

Journal of Semiconductors, 2025, 46(5): 051803. doi: 10.1088/1674-4926/24100032

2

Photovoltaic properties of Cu2O-based heterojunction solar cells using n-type oxide semiconductor nano thin films prepared by low damage magnetron sputtering method

Toshihiro Miyata, Kyosuke Watanabe, Hiroki Tokunaga, Tadatsugu Minami

Journal of Semiconductors, 2019, 40(3): 032701. doi: 10.1088/1674-4926/40/3/032701

3

Substrate temperature dependent studies on properties of chemical spray pyrolysis deposited CdS thin films for solar cell applications

Kiran Diwate, Amit Pawbake, Sachin Rondiya, Rupali Kulkarni, Ravi Waykar, et al.

Journal of Semiconductors, 2017, 38(2): 023001. doi: 10.1088/1674-4926/38/2/023001

4

β-FeSi2 films prepared on 6H-SiC substrates by magnetron sputtering

Hong Li, Hongbin Pu, Chunlei Zheng, Zhiming Chen

Journal of Semiconductors, 2015, 36(6): 063005. doi: 10.1088/1674-4926/36/6/063005

5

Effect of active layer deposition temperature on the performance of sputtered amorphous In-Ga-Zn-O thin film transistors

Jie Wu, Junfei Shi, Chengyuan Dong, Zhongfei Zou, Yuting Chen, et al.

Journal of Semiconductors, 2014, 35(1): 014003. doi: 10.1088/1674-4926/35/1/014003

6

The influence of RF power on the electrical properties of sputtered amorphous In-Ga-Zn-O thin films and devices

Junfei Shi, Chengyuan Dong, Wenjun Dai, Jie Wu, Yuting Chen, et al.

Journal of Semiconductors, 2013, 34(8): 084003. doi: 10.1088/1674-4926/34/8/084003

7

Structural and optical properties of Zn3N2 films prepared by magnetron sputtering in NH3-Ar mixture gases

Wu Jiangyan, Yan Jinliang, Yue Wei, Li Ting

Journal of Semiconductors, 2012, 33(4): 043001. doi: 10.1088/1674-4926/33/4/043001

8

Physical properties of sprayed antimony doped tin oxide thin films: Role of thickness

A. R. Babar, S. S. Shinde, A.V. Moholkar, C. H. Bhosale, J. H. Kim, et al.

Journal of Semiconductors, 2011, 32(5): 053001. doi: 10.1088/1674-4926/32/5/053001

9

AlGaAs/GaAs tunnel junctions in a 4-J tandem solar cell

Lü Siyu, Qu Xiaosheng

Journal of Semiconductors, 2011, 32(11): 112003. doi: 10.1088/1674-4926/32/11/112003

10

Preparation and characterization of transparent conducting ZnO:W films by DC magnetron sputtering

Zhang Huafu, Yang Shugang, Liu Hanfa, Yuan Changkun

Journal of Semiconductors, 2011, 32(4): 043002. doi: 10.1088/1674-4926/32/4/043002

11

Annealing effects on the formation of semiconducting Mg2Si film using magnetron sputtering deposition

Xiao Qingquan, Xie Quan, Chen Qian, Zhao Kejie, Yu Zhiqiang, et al.

Journal of Semiconductors, 2011, 32(8): 082002. doi: 10.1088/1674-4926/32/8/082002

12

An MWCNT-doped SnO2 thin film NO2 gas sensor by RF reactive magnetron sputtering

Lin Wei, Huang Shizhen, Chen Wenzhe

Journal of Semiconductors, 2010, 31(2): 024006. doi: 10.1088/1674-4926/31/2/024006

13

Influence of the distance between target and substrate on the properties of transparent conducting Al–Zr co-doped zinc oxide thin films

Zhang Huafu, Liu Hanfa, Zhou Aiping, Yuan Changkun

Journal of Semiconductors, 2009, 30(11): 113002. doi: 10.1088/1674-4926/30/11/113002

14

Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering

Zhang Huafu, Lei Chengxin, Liu Hanfa, Yuan Changkun

Journal of Semiconductors, 2009, 30(4): 043004. doi: 10.1088/1674-4926/30/4/043004

15

Boron-doped silicon film as a recombination layer in the tunnel junction of a tandem solar cell

Shi Mingji, Wang Zhanguo, Liu Shiyong, Peng Wenbo, Xiao Haibo, et al.

Journal of Semiconductors, 2009, 30(6): 063001. doi: 10.1088/1674-4926/30/6/063001

16

Influence of the sputtering pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering

Liu Hanfa, Zhang Huafu, Lei Chengxin, Yuan Changkun

Journal of Semiconductors, 2009, 30(2): 023001. doi: 10.1088/1674-4926/30/2/023001

17

Influence of Substrate Temperature and Nitrogen Gas on Zinc Nitride Thin Films Prepared by RF Reactive Sputtering

Zhang Jun, Xie Erqing, Fu Yujun, Li Hui, Shao Lexi, et al.

Chinese Journal of Semiconductors , 2007, 28(8): 1173-1178.

18

Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films

Li Jun, Yan Jinliang, Sun Xueqing, Li Kewei, Yang Chunxiu, et al.

Chinese Journal of Semiconductors , 2007, 28(9): 1402-1405.

19

Influence of Sputtering Pressure on the Properties of ZnO:Ga Films Prepared by DC Reactive Magnetron Sputtering

Ma Quanbao, Zhu Liping, Ye Zhizhen, He Haiping, Wang Jingrui, et al.

Chinese Journal of Semiconductors , 2007, 28(S1): 285-288.

20

Structural Characteristic of CdS Thin films and Their Influence on Cu(in,Ga)Se2(CIGS) Thin Film Solar Cell

Xue Yuming, Sun Yun, He Qing, Liu Fangfang, Li Changjian,and Ji Mingliang, et al.

Chinese Journal of Semiconductors , 2005, 26(2): 225-229.

  • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2561 Times PDF downloads: 15 Times Cited by: 0 Times

    History

    Received: 22 October 2012 Revised: 18 January 2013 Online: Published: 01 June 2013

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Zhifang Lei, Guangyu Chen, Shibin Gu, Lingling Dai, Rong Yang, Yuan Meng, Ted Guo, Liwei Li. Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications[J]. Journal of Semiconductors, 2013, 34(6): 063004. doi: 10.1088/1674-4926/34/6/063004 ****Z F Lei, G Y Chen, S B Gu, L L Dai, R Yang, Y Meng, T Guo, L W Li. Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications[J]. J. Semicond., 2013, 34(6): 063004. doi: 10.1088/1674-4926/34/6/063004.
      Citation:
      Zhifang Lei, Guangyu Chen, Shibin Gu, Lingling Dai, Rong Yang, Yuan Meng, Ted Guo, Liwei Li. Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications[J]. Journal of Semiconductors, 2013, 34(6): 063004. doi: 10.1088/1674-4926/34/6/063004 ****
      Z F Lei, G Y Chen, S B Gu, L L Dai, R Yang, Y Meng, T Guo, L W Li. Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications[J]. J. Semicond., 2013, 34(6): 063004. doi: 10.1088/1674-4926/34/6/063004.

      Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications

      DOI: 10.1088/1674-4926/34/6/063004
      More Information
      • Corresponding author: Li Liwei, Email:liliwei@enn.cn
      • Received Date: 2012-10-22
      • Revised Date: 2013-01-18
      • Published Date: 2013-06-01

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return