J. Semicond. > 2013, Volume 34 > Issue 7 > 074013
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SEMICONDUCTOR DEVICES

Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

Jiaqi Yu1, 2, Changde He1, 2, Kejing Yuan1, Deqin Lian2, Chenyang Xue1, 2, and Wendong Zhang1, 2

+ Author Affiliations

 Corresponding author: Xue Chenyang, Email:xuechenyang@nuc.edu.cn

DOI: 10.1088/1674-4926/34/7/074013

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Abstract: A kind of piezoresistive ultrasonic sensor based on MEMS is proposed, which is composed of a membrane and two side beams. A simplified mathematical model has been established to analyze the mechanical properties of the sensor. On the basis of the theoretical analysis, the structural size and layout location of the piezoresistors are determined by simulation analysis. The boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic signal. The membrane-beam microstructure is fabricated integrally by MEMS manufacturing technology. Finally, this paper presents the experimental characterization of the ultrasonic sensor, validating the theoretical model used and the simulated model. The sensitivity reaches-116.2 dB (0 dB reference=1 V/μbar, 31 kHz), resonant frequency is 39.6 kHz, direction angle is 55°.

Key words: MEMS, piezoresistive, ultrasonic sensor, ANSYS, membrane-beams



[1]
Jia Baoxian, Bian Wenfeng, Zhao Wansheng, et al. Application and development of piezoelectric ultrasonic transducers. Piezoelectrics & Acousto-optics, 2005, 27(2):131(in Chinese) http://en.cnki.com.cn/Article_en/CJFDTOTAL-YDSG200502012.htm
[2]
Fu D. Fabrication method of 2-dimensional piezoelectric micromachined ultrasonic transducer arrays. Micronanoelectron Technol, 2011, 48(8):523
[3]
Ge Lifeng. Theoretical model and optimization design of capacitive micromachined ultrasonic transducer. Science in China (Series E:Technological Sciences), 2007, 37(5):700
[4]
Luan G D. Progress in piezoelectric MEMS ultrasonic transducers. Appl Acoustics, 2012, 31(3):161 http://en.cnki.com.cn/Article_en/CJFDTOTAL-YYSN201203001.htm
[5]
Zeng Z S. Analysis and fabrication of a polymer-based capacitance micro/array ultrasonic transducer. National University of Kaohsiung, 2005
[6]
Kung J T. An integrated air-gap-capacitor pressure sensor and digital readout with sub-100 attofarad resolution. Microelectromechan Syst, 1992, 1:121 doi: 10.1109/84.186391
[7]
Wang Fuxing. Mechanics of materials. Beijing:The Publishing House of Ordnance Industry, 2001:127(in Chinese)
[8]
Wu Cheng. Investigation of the air-coupled piezoelectric ultrasonic sensor. Huazhong University of Science and Technology, 2007(in Chinese)
[9]
Chen S. Fabrication and testing of a silicon-based piezoresistive two-axis accelerometer. Nanotechnology and Precision Engineering, 2008, 6(4):272 http://en.cnki.com.cn/Article_en/CJFDTOTAL-NMJM200804008.htm
Fig. 1.  Block diagram of the sensor.

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Fig. 2.  Simplified structural analysis.

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Fig. 3.  Geometry size of the structure.

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Fig. 4.  Equivalent stress distribution nephogram.

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Fig. 5.  First to fourth vibration mode of the sensor.

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Fig. 6.  Stress distribution curve.

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Fig. 7.  Scattergram of the piezoresistors.

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Fig. 8.  Fabrication process.

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Fig. 9.  Packaged chip and SEM picture.

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Fig. 10.  Frequency response curve.

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Fig. 11.  Test site.

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Fig. 12.  Results of sensor directivity.

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[1]
Jia Baoxian, Bian Wenfeng, Zhao Wansheng, et al. Application and development of piezoelectric ultrasonic transducers. Piezoelectrics & Acousto-optics, 2005, 27(2):131(in Chinese) http://en.cnki.com.cn/Article_en/CJFDTOTAL-YDSG200502012.htm
[2]
Fu D. Fabrication method of 2-dimensional piezoelectric micromachined ultrasonic transducer arrays. Micronanoelectron Technol, 2011, 48(8):523
[3]
Ge Lifeng. Theoretical model and optimization design of capacitive micromachined ultrasonic transducer. Science in China (Series E:Technological Sciences), 2007, 37(5):700
[4]
Luan G D. Progress in piezoelectric MEMS ultrasonic transducers. Appl Acoustics, 2012, 31(3):161 http://en.cnki.com.cn/Article_en/CJFDTOTAL-YYSN201203001.htm
[5]
Zeng Z S. Analysis and fabrication of a polymer-based capacitance micro/array ultrasonic transducer. National University of Kaohsiung, 2005
[6]
Kung J T. An integrated air-gap-capacitor pressure sensor and digital readout with sub-100 attofarad resolution. Microelectromechan Syst, 1992, 1:121 doi: 10.1109/84.186391
[7]
Wang Fuxing. Mechanics of materials. Beijing:The Publishing House of Ordnance Industry, 2001:127(in Chinese)
[8]
Wu Cheng. Investigation of the air-coupled piezoelectric ultrasonic sensor. Huazhong University of Science and Technology, 2007(in Chinese)
[9]
Chen S. Fabrication and testing of a silicon-based piezoresistive two-axis accelerometer. Nanotechnology and Precision Engineering, 2008, 6(4):272 http://en.cnki.com.cn/Article_en/CJFDTOTAL-NMJM200804008.htm

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    Received: 26 January 2013 Revised: 29 March 2013 Online: Published: 01 July 2013

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      Article Navigation >  Journal of Semiconductors  > 2013  >  34(7): 074013
      Jiaqi Yu, Changde He, Kejing Yuan, Deqin Lian, Chenyang Xue, Wendong Zhang. Design and measurement of a piezoresistive ultrasonic sensor based on MEMS[J]. Journal of Semiconductors, 2013, 34(7): 074013. doi: 10.1088/1674-4926/34/7/074013 ****J Q Yu, C D He, K J Yuan, D Q Lian, C Y Xue, W D Zhang. Design and measurement of a piezoresistive ultrasonic sensor based on MEMS[J]. J. Semicond., 2013, 34(7): 074013. doi: 10.1088/1674-4926/34/7/074013.
      Citation:
      Jiaqi Yu, Changde He, Kejing Yuan, Deqin Lian, Chenyang Xue, Wendong Zhang. Design and measurement of a piezoresistive ultrasonic sensor based on MEMS[J]. Journal of Semiconductors, 2013, 34(7): 074013. doi: 10.1088/1674-4926/34/7/074013 ****
      J Q Yu, C D He, K J Yuan, D Q Lian, C Y Xue, W D Zhang. Design and measurement of a piezoresistive ultrasonic sensor based on MEMS[J]. J. Semicond., 2013, 34(7): 074013. doi: 10.1088/1674-4926/34/7/074013.
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      Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

      DOI: 10.1088/1674-4926/34/7/074013
      • 1.

        Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China

      • 2.

        Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China

      Funds:

      the National Natural Science Foundation of China 61127008

      Project supported by the National Natural Science Foundation of China (No. 61127008)

      More Information
      • Corresponding author: Xue Chenyang, Email:xuechenyang@nuc.edu.cn
      • Received Date: 2013-01-26
      • Revised Date: 2013-03-29
      • Published Date: 2013-07-01

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